UHP50 Ultra High Purity VCR Connection SEMI F19 Pressure Transmitter
You are here: Home » Products » Ultra High Purity Pressure Transmitter » UHP50 Ultra High Purity VCR Connection SEMI F19 Pressure Transmitter

loading

Share to:
sharethis sharing button

UHP50 Ultra High Purity VCR Connection SEMI F19 Pressure Transmitter

Used in semiconductor fluid pressure measurement system in the boundaries of ultra-high purity (UHP).
Pressure range 0~5000psi
Output Signal 4~20mA Analog Signal
Compliance with SEMI F19, Ra<0.13 μm
100 Helium leak test and packed in class 100 clean room
Digital circuit compensation
Strong anti-interference and excellent long-term stability
Available for measurement of absolute pressure, gauge
Availability:
Quantity:
  • UHP50

  • ORR

  • ORR-UHP50-5000psi

Applications of Pressure transducer

- OEM customer

- Semiconductor

- Solar PV

- Specialty Gas


Introduction of Pressure transducer

UHP50 Ultra High Purity  pressure transducer continue to push the boundaries of ultrahigh-purity (UHP) pressure measurement performance, provides reliable, clean, and consistent flow and pressure measurement solution at high temperatures and speeds. 

Ultra High Purity  pressure transducer Compliance with SEMI F19, Ra<0.13 μm, 100 Helium leak test and packed in class 100 clean room, it provides semiconductor chip fabricators, foundries, and the mechanical contractors and gas/chemical suppliers who support them with a variety of general industrial fluid pressure measurement system products that deliver reliable performance in semiconductor manufacturing applications.


Special features of Pressure transducer

·Wet parts apply all stainless steel welding excellent corrosion resitance

·Output 4~20mA

·Wet parts apply all stainless steel welding excellent corrosion resitance

·Strong anti-interference and excellent long-term stability

·Digital circuit compensation

·All wetted parts are electro-polished accord to SEMl F19, Ra≤0.13um

·100% Helium leak tested and packed in class 100 clean room

·Accuracy up to 0.1%BFSL(include linearity, hysteresis and repeatability)

·Various type of VCR connection available: male, female, fixed and swivel

Accuracy

0.15%BFSL @25C(include linearity, hysteresis and repeatability)

Pressure range0...80psi-0...5000psi(include vacuum)
Over pressure2 times of full scale
Burst pressure5 times of full scale
Long term stabilitymax 0.25%FS/year
Thermal driftmax 0.25%FS/10℃(-20...+85℃)
Leakage test<1*10-9 mbar L/S
Response time<1.5mS

Output signal

4-20mA 2-wire
Power supply10-30VDC
Load resistance≤(Us-10V)/0.02A Ω
Insulation resistance>100MQ @ 250VDC

Ambient temperature

-20 ...85°C

Media temperature-20 .. 140℃
Storage temperature-30 ... 85°C
Ingress protectionIP67 EN60529
Ambient humidity<95 % RH, non-condensation

Sensor material

17-4PH

Wetted parts316LSS
Housing material304SS
Electrical connectionM12*1(4 pins)
Process connection9/16"-18UNF(1/4"VCR) female, male, fixed, swivel
Surface finishRas≤0.13um(typical)

Ras≤0.18um(max)

Explosion proof
Ex na lC T4/T5/T6 Gc


Dimension in mm
1
Wiring connection
2


UHP50 Series
Output signal14-20mA 2-wire
Electrical connection1M12*1(4 pins)
Connection type1Swivel thread
2Fixed thread
Thread typeMMale
FFemale
Pressure rangeXXXXXPlease refer the range code table in page 2
ZCustomized

Explosion proof

SNone
XEx nA IIC T4/T5/T6


Previous: 
Next: 

PRODUCT CATEGORY

Product Inquire
ORR Sensor Co., Ltd. 
Total Sensor Solution

QUICK LINKS

PRODUCTS CATEGORY

CONTACT US

  Add : 6# Building, No. 285 Rongxing Road, Shanghai, 201613
    E-mail: orr@orrsensor.com
  Whatsapp: +86-18917497750
   Phone: +86-18917497750
 Wechat: +86-18917497750
Copyright   2023 ORR Sensor Co., Ltd.